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Preparation of ZnO Thin Film on Diamond-Like Carbon/Si Substrate by RF Magnetron Sputtering for Surface Acoustic Wave Application
Wen-Ching Shih; Rei-Ching Huang; Yan-Kai Peng; Mu-Shiang Wu
Ferroelectrics, 1563-5112, Volume 380, 2009, Pages 20 – 29

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